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- Project Title: Striker N2O Reduction Characterization & Recipe Development
- Project Description: As sustainability initiatives gain prominence, the reduction of N₂O consumption is critical for enhancing greenhouse gas performance. Leveraging CVD PEALD process recipes that incorporate both O₂ and N₂O as oxidants, a strategy has been implemented to decrease N₂O flow by 90%, substituting the remainder with inert argon gas. This approach minimizes oxidant waste while preserving plasma volume. By designating O₂ as the primary oxidant, gas utilization efficiency is improved without compromising process stability. Hence, this method necessitates comprehensive evaluation across a range of process conditions to validate its robustness and readiness for high-volume manufacturing.
- Project Scope: Literature study of the reaction chemistry involved in the process regime, characterization of process performance, morphology, and composition of the layer film. Perform experiments using Design of Experiments (DOE) to validate the hypothesis and analyse the resultant data using Analysis of Variance (ANOVA) and other analytical techniques.
- Project Deliverable: Full study of reaction pathways, impact of various process gases on layer film. Develop working recipe for N2O reduction that can simulate the process outcomes.
- Requirement: Bachelor's in Engineering
